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J Weld Join > Volume 42(5); 2024 > Article
Journal of Welding and Joining 2024;42(5):560-566.
DOI: https://doi.org/10.5781/JWJ.2024.42.5.13    Published online October 31, 2024.
Tensile Strength Property with PdCo-Cu Multi-Layer Lamination and Heat Treatment of MEMS Probe for Probe Card
So-Hee Hyun1  , Mi-Song Kim1  , Won Sik Hong1  , Jae-Hyung Lee2, Tae-Jong Lee2
1Electronic Convergence Materials & Device Research Center, Korea Electronics Technology Institute, Seongnam, 13509, Korea
2Semiconductor Division, Sae Han Microtech Co. Ltd., Namyangju, 12018, Korea
Correspondence:  Won Sik Hong,
Email: wshong@keti.re.kr
Received: 10 October 2024   • Revised: 14 October 2024   • Accepted: 21 October 2024
Abstract
Cantilever wire probe card has limited to transport high-speed signal because of long wire but it is suitable for inspecting high-current and high voltage semiconductor such as wide band gap (WBG) power semiconductors. Superior mechanical property of a probe card wire is in demand because it is respectively used wafer inspection with in and out pad on the top surface of the power semiconductor wafer. Therefore, in this study, tensile specimens of micro electro-mechanical systems (MEMS) probe alternatively layered and electroplated with palladium (Pd)-cobalt (Co) alloy layers and copper (Cu) layers. MEMS probe was also measured tensile strength and elongation with multi-lamination and heat treatment conditions. Additionally, fractography of fracture surface after tensile test were analyzed using a scanning electron microscope (SEM). As the number of PdCo-Cu multi-layer increased, 11, 15 and 21 layered specimens showed higher tensile strength and longer elongation than 5 layered specimens because of the increase of laminated interface of PdCo and Cu. 7 layered specimen after isothermal aging had higher tensile strength and longer elongation than before isothermal aging. In 5, 11, 15 and 21 layered specimens, the fracture surfaces of tensile test specimens without aging treatment showed a ductile-brittle mixed fracture mode. Fracture surfaces of 7-layered specimen before and after isothermal aging showed a ductile-brittle mixed fracture mode.
Key Words: Cantilever wire, Fracture mechanism, MEMS probe, Probe card, Tensile strength
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ORCID iDs

So-Hee Hyun
https://orcid.org/0009-0004-9380-1890

Mi-Song Kim
https://orcid.org/0000-0002-4717-9365

Won Sik Hong
https://orcid.org/0000-0001-8398-177X

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