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Journal of KWJS 2010;28(6):40-44.
Published online January 10, 2011.
A Study on Laser Assisted Machining for Silicon Nitride Ceramics (Ⅳ) - Mechanism and Application of LAM for Silicon Nitride Ceramics
Jong-Do Kim, Su-Jin Lee, Seo-Jeong Park, Jae-Hoon Lee
Abstract
  Laser assisted machining (LAM) has been researched in order to machine the silicon nitride ceramics economically and effectively. LAM is an effective machining method by local heating of the cutting part to the softening temperature of the silicon nitride using laser beam. When silicon nitride ceramics is heated using a laser beam, the surface of silicon nitride ceramic is softened, oxidized and decomposed. And then surface hardness is decreased. Through machining in low viscosity and hardness conditions, silicon nitride was machined effectively and the life span of tool was increased. The plastic deformation was occurred due to softening of amorphous YSiAlON above 1,000℃. Transgranular fracture of β-Si₃N₄ was occurred when YSiAlON was not softened, but mostly intergranular fracture was occurred by the plastic deformation of softened YSiAlON.
Key Words: Silicon nitride, HPDL, LAM, Oxidation, Softening, Cutting mechanism, Application


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