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Laser Soldering Process Optimization of MEMS Probe of Probe Card for Semiconductor Wafer Test |
Myeongin Kim, Won Sik Hong, Mi-Song Kim |
J Weld Join. 2022;40(3):271-277. Published online 2022 June 2 DOI: https://doi.org/10.5781/JWJ.2022.40.3.9 |
Laser Soldering Process Optimization of MEMS Probe of Probe Card for Semiconductor Wafer Test Study on Retest Reduction by Minimizing Probe Card Contact Resistance at Wafer Test Design of New Au–NiCo MEMS Vertical Probe for Fine-Pitch Wafer-Level Probing 4567433 Complex probe card for testing a semiconductor wafer 4523144 Complex probe card for testing a semiconductor wafer Multitests Ultraflat™ process meets requirements of high parallel vertical probe card applications A microelectronic test pattern for analyzing automated wafer probing and probe card problems A microelectronic test pattern for analyzing automated wafer probing and probe card problems A new probe design combining finite element method and optimization used for vertical probe card in wafer probing Laser Soldering Properties of MEMS Probe for Semiconductor Water Testing |
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